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Overview of MEMS and Microsystems
Hsu sjsu. Micro actuators valves, pumps and microfluidics; electrical and optical relays and switches; grippers, tweezers and tongs; linear and rotary motors, etc. Inkjet printer heads. Micro device components e. They can be of the size of a rice grain, or smaller! Two examples: - Inertia sensors for air bag deployment systems in automobiles - Microcars. Miniaturization Makes Engineering Sense!!!
MEMS and Microsystems Design and Manufacture
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