MEMS & microsystems: design and manufacture / Tai-Ran HsuShowing best matches Show all copies. What makes Biblio different? Facebook Instagram Twitter. Sign In Register Help Basket. Basket items. Toggle navigation. Summary Discuss Reviews 0 Includes bibliographical references and index.
MEMS and Microsystems Design, Manufacture, and Nanoscale Engineering
MEMS and Microsystems: Design and Manufacture
You are currently using the site but have requested a page in the site. Would you like to change to the site? Tai-Ran Hsu. View Instructor Companion Site. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS. Request permission to reuse content from this site.
Chapter 2 Working Principles of Microsystems P. Transducers Advantages Disadvantages Piezoresistors High sensitivity. Sensitive to temperature. Small sizes. Produced by doping foreign substances to silicon substrates. Advantages of a and b have been presented in Problem 2. Advantage of c is high resolution and sensitivity, especially for high temperature applications.
Get this from a library! MEMS and microsystems: design and manufacture. [Tai- Ran Hsu].
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Hsu sjsu. Micro actuators valves, pumps and microfluidics; electrical and optical relays and switches; grippers, tweezers and tongs; linear and rotary motors, etc. Inkjet printer heads. Micro device components e. They can be of the size of a rice grain, or smaller!
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